Minority-carrier exclusion effect in thin-film SOI temperature sensor

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 24, Issue 5, 2003, Pages 461-465

  Li, Bin ^a   Lai, Peitao ^b   Liu, Baiyong ^a   Zheng, Xueren ^a  

^a SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

High temperature sensors; Minority carrier exclusion effect; SOI; Spreading resistance

Indexed keywords

RESISTORS; STRUCTURE (COMPOSITION); THIN FILMS;

HIGH TEMPERATURE SENSOR; MINORITY CARRIER EXCLUSION EFFECT; SPREADING RESISTANCE;

SENSORS;

EID: 0042819652     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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