Three-dimensional macropore arrays in p-type silicon fabricated by electrochemical etching

Journal of the Korean Physical Society

Volumn 55, Issue 1, 2009, Pages 5-9

  Kim, Jae Hyun ^a   Kim, Kang Pil ^a   Lyu, Hong Kun ^a   Woo, Sung Ho ^a   Seo, Hong Seok ^b   Lee, Jung Ho ^b  

^a Daegu Gyeongbuk Institute of Science and Technology   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

Electrochemical etching; Macropore; P type silicon

Indexed keywords

EID: 69249200569     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.55.5     Document Type: Article

References (18)

1. H. Ohji, P. T. J. Gennissen, P. J. French and K. Tsutsumi, J. Micromech. Microeng. 10, 440 (2000).
2. R. Angeluccci, A. Poggi, L. Dori, G. C. Candinali, A. Parisini, A. Tagliani, M. Mariasaldi and F. Cavani, Sens. Actuators A 74, 1 (1999).
3. V. Lehmann, Electrochemistry of Silicon (Wiley-VCH, Weinheim, 2002), p. 233.
4. A. Birner, U. Grüning, S. Ottow, A. Schneider, F. Müller, V. Lehmann, H. Foil and U. Gösele, Phys. Status Solidi A 165, 111 (1998).
5. J. P. Clarkson, W. Sun, K. D. Hirschman, L. L. Gadeken and P. M. Fauchet, Phys. Status Solidi A 204, 1536 (2007).
6. V. Lehmann, J. Electrochem. Soc. 140, 2836 (1993).
7. V. Lehmann and S. Rönnebeck, J. Electrochem. Soc. 146, 2968 (1999).
8. E. A. Ponomarev and C. Lévy-Glément, Electrochem. Solid-State Lett. 1, 42 (1998).
9. R. B. Wehrspohn, J.-N. Chazalviel and F. Ozanzm, J. Electrochem. Soc. 145, 2958 (1998).
10. J. Carstensen, M. Christophersen and H. Foil, Mater. Sci. Eng. B 69-70, 23 (2000).
11. E. S. Kooij and D. Vanmaekelbergh, J. Electrochem. Soc. 144, 1296 (1997).
12. A. Vyatkin, V. Starkov, V. Tzeitlin, H. Presting, J. Konle and U. König, J. Electrochem. Soc. 149, G70 (2002).
13. K. Kobayashi, F. A. Harraz, S. Izuo, T. Sakka and Y. H. Ogata, J. Electrochem. Soc. 153, C218 (2006).
14. X. G. Zhang, J. Electrochem. Soc. 151, C69 (2004).
15. J. F. Tyler and G. N. Patey, J. Chem. Phys. 110, 10937 (1999).
16. J. N. Chazalviel, R. B. Wehrspohn and F. Ozanam, Mater. Sei. Eng. B 69-70, 1 (2000).
17. X. G. Zhang, J. Electrochem. Soc. 151, C69 (2004).
18. A. F. Vyatkin, J. Linnros, N. Lalic and M. Rosier, Phys. Low-Dimens. Semicond. Struct. 5/6, 89 (1997).