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Volumn 95, Issue 7, 2009, Pages

Study on the formation of dodecagonal pyramid on nitrogen polar GaN surface etched by hot H3 PO4

Author keywords

[No Author keywords available]

Indexed keywords

BASE PLANE; ETCHING PROCESS; ETCHING TEMPERATURE; FORMATION MECHANISM; LASER LIFT-OFF; LIGHT OUTPUT POWER; METALORGANIC CHEMICAL VAPOR DEPOSITION; OBLIQUE ANGLES; ROUGHENED SURFACES; TEMPERATURE INCREASE; THERMODYNAMICS AND KINETICS; TIME EVOLUTIONS;

EID: 69249165856     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3211970     Document Type: Article
Times cited : (42)

References (15)
  • 1
    • 0000274548 scopus 로고    scopus 로고
    • Damage-free separation of GaN thin films from sapphire substrates
    • DOI 10.1063/1.120816, PII S0003695198018014
    • W. S. Wong, T. Sands, and N. W. Cheung, Appl. Phys. Lett. 0003-6951 72, 599 (1998). 10.1063/1.120816 (Pubitemid 128671253)
    • (1998) Applied Physics Letters , vol.72 , Issue.5 , pp. 599-601
    • Wong, W.S.1    Sands, T.2    Cheung, N.W.3
  • 13
    • 0001493695 scopus 로고    scopus 로고
    • Crystallographic wet chemical etching of GaN
    • DOI 10.1063/1.122543, PII S0003695198007414
    • D. A. Stocker, E. F. Schubert, and J. M. Redwing, Appl. Phys. Lett. 0003-6951 73, 2654 (1998). 10.1063/1.122543 (Pubitemid 128674027)
    • (1998) Applied Physics Letters , vol.73 , Issue.18 , pp. 2654-2656
    • Stocker, D.A.1    Schubert, E.F.2    Redwing, J.M.3
  • 15
    • 0003475786 scopus 로고
    • (North-Holland, Amsterdam)
    • K. Sangwal, Etching of Crystals (North-Holland, Amsterdam, 1987), pp. 87-160.
    • (1987) Etching of Crystals , pp. 87-160
    • Sangwal, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.