Planar microscale ionization devices in atmospheric air with diamond-based electrodes

Plasma Sources Science and Technology

Volumn 18, Issue 3, 2009, Pages

  Go, D B ^a   Fisher, T S ^a   Garimella, S V ^a   Bahadur, V ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC AIR; CANDIDATE MATERIALS; CURRENT MAGNITUDES; ELECTRODE GAP; FIELD-EMISSIONS; GAS SENSING; IONIZATION CURRENT; MICRO-SCALES; ON CHIPS; ON-CHIP DEVICES; POLYCRYSTALLINE DIAMONDS; PREBREAKDOWN; QUARTZ SUBSTRATE; SPARK DISCHARGE;

ATMOSPHERIC ELECTRICITY; DIAMONDS; ELECTRIC SPARKS; ELECTROHYDRODYNAMICS; GAS SENSING ELECTRODES; IONIZATION; MASS SPECTROMETRY; OXIDE MINERALS; QUARTZ; TITANIUM;

ATMOSPHERIC IONIZATION;

EID: 68649123385     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/3/035004     Document Type: Article

References (38)

1. Kornienko O, Reilly P T A, Whitten W B and Ramsey J M 2000 Anal. Chem. 72 559-62
2. Hauschild J-P, Wapelhorst E and Müller J 2007 Int. J. Mass Spectrosc. 264 53-60
3. Debatin M, Kröner M, Mikosch J, Trippel S, Morrison N, Reetz-Lamour M, Woias P, Wester R and Weidemüller M 2008 Phys. Rev. A 77 033422
4. Longwitz R G, van Lintel H and Renaud P 2003 J. Vac. Sci. Technol. B 21 1570-73
5. Lim H H, Park D, Maeng J Y, Hwang J and Kim Y J 2006 19th IEEE Int. Conf. on Micro Electro Mechanical Systems (Istanbul, Turkey) pp 62-5
6. Chua B, Wexler A S, Tien N C, Niemeier D A and Holmen B A 2008 J. Microelectromech. Syst. 17 115-23
7. Go D B, Garimella S V, Fisher T S and Mongia R K 2007 J. Appl. Phys. 102 053302
8. Schlitz D, Garimella S and Fisher T 2004 ASME Heat Transfer/Fluids Engineering Summer Conf. (Charlotte, NC) p 56470
9. Paschen F 1889 Ann. Phys. 273 p 69
10. Nassar E 1971 Fundamentals of Gaseous Ionization and Plasma Electronics (New York: Wiley-Interscience) pp 225-6
11. Torres J-M and Dhariwal R S 1999 Nanotechnology 10 102-7
12. Lee R-T, Chung H-H and Chiou Y-C 2001 IEE Proc.-Sci. Meas. Technol. 148 8-14
13. Slade P G and Taylor E D 2002 IEEE Trans. Compon. Packag. Technol. 25 390-96
14. Zhang W, Fisher T S and Garimella S V 2004 J. Appl. Phys. 96 6066-72
15. Radmilović-Radjenović M, Lee J K, Iza F and Park G Y 2005 J. Phys. D: Appl. Phys 38 950-4
16. Radmilović-Radjenović M and Radjenović B 2007 Plasma Sources Sci. Technol. 16 337-40
17. Radmilović-Radjenović M and Radjenović B 2007 IEEE Trans. Plasma Sci. 35 1223-8
18. Radmilović-Radjenović M and Radjenović B 2008 Plasma Sources Sci. Technol. 17 024005
19. Radmilović-Radjenović M and Radjenović B 2008 Europhys. Lett. 83 25001
20. Ono T, Sim D Y and Esashi M 2000 J. Micromech. Microeng. 10 445-51
21. Wallash A and Levit L 2003 Proc. SPIE 4980 87-96
22. Chen C-H, Yeh J A and Wang P-J 2006 J. Micromech. Microeng. 16 1366-73
23. Strong F W, Skinner J L and Tien N C 2008 J. Micromech. Microeng. 18 075025
24. Wong T K S and Ingram S G 1993 J. Phys. D: Appl. Phys. 26 976-85
25. Zhu W, Bower C, Kochanski P and Jin S 2001 Solid-State Electron. 45 921-28
26. Kang W P, Fisher T S and Davidson J L 2001 New Diam. Front. Carbon Technol. 11 129-46
27. Gröning O, Nilsson L-O, Gröning P and Schlapbach L 2001 Solid-State Electron. 45 929-44
28. Peterson M S, Zhang W, Fisher T S and Garimella S V 2005 Plasma Sources Sci. Technol. 14 654-60
29. Maxfield F and Benedict R 1941 Theory of Gaseous Conduction and Electronics (New York: McGraw-Hill)
30. Maschmann M R, Amama P B, Goyal A, Iqbal Z, Gat R and Fisher T S 2006 Carbon 44 10-18
31. Kang W P, Davidson J L, Wisitsora-at A, Howell M, Jamaludin A, Wong Y M, Soh K L and Kerns D V 2003 J. Vac. Sci. Technol. B 21 593-6
32. Yunjun L, Jintian H, Ning Y and Binglin Z 1997 10th Int. Vacuum Microelectronics Conf. Technical Digest (Kyongju, Korea) pp 137-40
33. Wisitsora-at A, Kang W P, Davidson J L, Kerns D V and Fisher T S 2003 J. Vac. Sci. Technol. B 21 614-7
34. Raizer Y P 1991 Gas Discharge Physics (New York: Springer-Verlag) pp 130-3
35. Fowler R and Nordheim L 1928 Proc. R. Soc. Lond. A 119 626-39
36. Go D B, Fisher T S and Garimella S V 2009 J. Phys. D: Appl. Phys. 42 055203
37. Walker D G, Harris C T, Fisher T S and Davidson J L 2005 Diamond Relat. Mater. 14 113-20
38. Robinson V S, Show Y, Swain G M, Reifenberger R G and Fisher T S 2006 Diamond Relat. Mater. 15 1601-8