Fabrication and field emission characteristics of lateral diamond field emitter

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 1 SPEC., 2003, Pages 593-596

  Kang, W P ^a   Davidson, J L ^a   Wisitsora at, A ^a   Howell, M ^a   Jamaludin, A ^a   Wong, Y M ^a   Soh, K L ^a   Kerns, D V ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CATHODES; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON DEVICE MANUFACTURE; ELECTRON EMISSION; ION BOMBARDMENT; OXIDES; PHOTOCURRENTS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; THERMAL CONDUCTIVITY;

EMISSION CURRENT; LATERAL DIAMOND FIELD EMITTER; LIFT OFF PROCESS; OXIDE PATTERNING PROCESS;

DIAMOND FILMS;

EID: 0037207779     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1516187     Document Type: Article

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