MEMS based integrated particle detection chip for real time environmental monitoring

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 62-65

  Lim, H H ^a   Park, D ^a   Maeng, J Y ^a   Hwang, J ^a   Kim, Y J ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED PARTICLES; COST EFFECTIVENESS; INTEGRATED CIRCUIT LAYOUT; MICROMACHINING; PARTICLE DETECTORS; REAL TIME SYSTEMS;

ENVIRONMENTAL MONITORING; INTEGRATED PARTICLES; MICRO CORONA; VIRTUAL IMPACTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 33750097209     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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