Low-resistance carbon nanotube contact plug to silicon

IEEE Electron Device Letters

Volumn 30, Issue 8, 2009, Pages 811-813

  Chai, Yang ^a   Xiao, Zhiyong ^a   Chan, Phillip C H ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Carbon nanotube (CNT); Contacts; Interconnection; Plug

Indexed keywords

CNT TIP; CONTACT LAYERS; CONTACT RESISTIVITIES; CONTACTS; CROSS-BRIDGE; INTERCONNECTION; INTERMEDIATE LAYERS; LOW RESISTANCE; PLUG; SI MOSFET; TEST STRUCTURE; THERMAL BEHAVIORS; THERMAL STABILITY; TI SILICIDE;

SEMICONDUCTING SILICON COMPOUNDS; SILICIDES; SILICON;

CARBON NANOTUBES;

EID: 68249149573     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2009.2024778     Document Type: Article

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