Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP film

Wuli Xuebao/Acta Physica Sinica

Volumn 58, Issue 7, 2009, Pages 5022-5028

  Li, Yang Ping ^a   Liu, Zheng Tang ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

GaP thin film; Infrared transmission; Plasma emission spectrum; RF magnetron sputtering

Indexed keywords

EID: 68249129905     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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