RF magnetron sputtering of GaP thin film and computer simulation of its depositing process

Wuli Xuebao/Acta Physica Sinica

Volumn 56, Issue 5, 2007, Pages 2937-2944

  Li, Yang Ping ^a   Liu, Zheng Tang ^a   Zhao, Hai Long ^a   Liu, Wen Ting ^a   Yan, Feng ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

Computer simulation; GaP; RF magnetron sputtering; Thin film

Indexed keywords

EID: 34249854564     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (21)