Studies on C2 radical by optical emission spectroscopy in an inductively-coupled CF4/CH4 plasma

Wuli Xuebao/Acta Physica Sinica

Volumn 54, Issue 4, 2005, Pages 1653-1658

  Huang, Song ^a   Xin, Yu ^a   Ning, Zhao Yuan ^a  

^a SOOCHOW UNIVERSITY   (China)

Author keywords

C2 radical; Inductively coupled plasma; Optical emission spectroscopy

Indexed keywords

EID: 17944382228     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (26)