Fabrication and frequency response characteristics of AlN-based solidly mounted resonator

Chinese Physics Letters

Volumn 26, Issue 4, 2009, Pages

  Xiong, Juan ^a   Gu, Hao Shuang ^a   Hu, Kuan ^a   Hu, Ming Zhe ^a  

^a HUBEI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC SURFACE WAVE FILTERS; ALUMINUM NITRIDE; ELECTROMECHANICAL COUPLING; FABRICATION; FILM PREPARATION; FREQUENCY RESPONSE; III-V SEMICONDUCTORS; MAGNETRON SPUTTERING; NATURAL FREQUENCIES; REFLECTION; SURFACE ROUGHNESS; TITANIUM COMPOUNDS;

BRAGG'S REFLECTORS; D.C. MAGNETRON SPUTTERING; DC MAGNETRON SPUTTERING; FILM-BULK-ACOUSTIC-RESONATOR; FREQUENCY RESPONSE CHARACTERISTIC; RF MAGNETIC SPUTTERING; SOLIDLY MOUNTED RESONATOR; SPUTTERING POWER; SPUTTERING PRESSURES; SUBSTRATES TEMPERATURE;

ACOUSTIC RESONATORS;

EID: 68149183716     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/26/4/048104     Document Type: Article

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