A-Si/SiOx Bragg-reflectors on micro-structured InP

Thin Solid Films

Volumn 483, Issue 1-2, 2005, Pages 257-260

  Schmidt Grund, R ^a   Nobis, T ^a   Gottschalch, V ^a   Rheinlander B ^a   Herrnberger, H ^a   Grundmann, M ^a  

^a UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

Bragg mirror; Curved micro structure; Ellipsometry; Optical coatings; Silicon oxide

Indexed keywords

CRYSTALLOGRAPHY; DIELECTRIC MATERIALS; ELLIPSOMETRY; INDIUM COMPOUNDS; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFLECTION; REFRACTIVE INDEX;

BRAGG MIRRORS; CURVED MICRO STRUCTURE; OPTICAL CONFINEMENT; SILICON OXIDE;

MIRRORS;

EID: 18844445330     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.12.048     Document Type: Article

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