Evolution of metastable phases in silicon during nanoindentation: Mechanism analysis and experimental verification

Nanotechnology

Volumn 20, Issue 30, 2009, Pages

  Mylvaganam, K ^a   Zhang, L C ^b   Eyben, P ^c   Mody, J ^d   Vandervorst, W ^c,d  

^a UNIVERSITY OF SYDNEY   (Australia)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

^c IMEC   (Belgium)

^d UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS PHASE; CRITICAL SIZE; CRYSTAL PARTICLES; DIAMOND STRUCTURES; EVOLUTION MECHANISM; EXPERIMENTAL VERIFICATION; IN-BETWEEN; IN-SITU; INDENTATION LOAD; INDENTER; MECHANISM ANALYSIS; MONOCRYSTALLINE SILICON; NANOSCOPIC SCALE; SI(1 0 0); SIX-COORDINATED SILICON;

CRYSTAL STRUCTURE; METASTABLE PHASES; MOLECULAR DYNAMICS; MOLECULAR ORIENTATION; NANOINDENTATION; SUGAR (SUCROSE); TIN; UNLOADING; VICKERS HARDNESS TESTING;

AMORPHOUS SILICON;

SILICON;

ARTICLE; CHEMICAL ANALYSIS; MOLECULAR DYNAMICS; MOLECULAR EVOLUTION; MOLECULAR SIZE; PREDICTION; PRIORITY JOURNAL;

EID: 67651207575     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/30/305705     Document Type: Article

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