An angled nano-tunnel fabricated on poly(methyl methacrylate) by a focused ion beam

Nanotechnology

Volumn 20, Issue 28, 2009, Pages

  Her, Eun Kyu ^a   Chung, Hee Suk ^a   Moon, Myoung Woon ^b   Oh, Kyu Hwan ^a  

^a Seoul National University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION VOLTAGES; BEAM ACCELERATION; FABRICATION PARAMETERS; GRAPHITIC STRUCTURES; HIGH ASPECT RATIO; INCIDENCE ANGLES; INCIDENT ANGLES; ION BEAM CURRENTS; ION FLUENCE; MEAN DIAMETER; NANO SCALE; NANO TUNNELS; NANOHOLES;

ASPECT RATIO; BEAM PLASMA INTERACTIONS; ELECTRIC POTENTIAL; ESTERS; FABRICATION; FOCUSED ION BEAMS; ION BOMBARDMENT; NANOSTRUCTURED MATERIALS; PHOTORESISTS; PRESSURE DROP; TUNNELS; WIND TUNNELS;

IONS;

GALLIUM; ION; NANOCONE; NANOMATERIAL; POLYMETHACRYLIC ACID; POLY(METHYL METHACRYLATE);

ACCELERATION; ARTICLE; ELECTRIC POTENTIAL; ION CURRENT; MOLECULAR MECHANICS; NANOFABRICATION; PRIORITY JOURNAL; SURFACE PROPERTY; CHEMISTRY; METHODOLOGY; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; ULTRASTRUCTURE;

MICROSCOPY, ELECTRON, SCANNING; MICROSCOPY, ELECTRON, TRANSMISSION; NANOSTRUCTURES; NANOTECHNOLOGY; POLYMETHYL METHACRYLATE;

EID: 67651148301     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/28/285301     Document Type: Article

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