Etching and forward transfer of fused silica in solid-phase by femtosecond laser-induced solid etching (LISE)

Applied Surface Science

Volumn 255, Issue 20, 2009, Pages 8343-8351

  Banks, David P ^a   Kaur, Kamal S ^a   Eason, Robert W ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Deposition; Etching; Femtosecond; Forward transfer; Fracture

Indexed keywords

DEPOSITION; ETCHING; FEMTOSECOND LASERS; FRACTURE; LASER PULSES; SILICON WAFERS; THIN FILMS;

CHEMICAL ETCHING; FEMTOSECONDS; FORWARD-TRANSFER; HIGH TEMPERATURE AND PRESSURE; MULTIPLE PULSE; SILICA SURFACE; THRESHOLD FLUENCES; TRANSPARENT MATERIAL;

FUSED SILICA;

EID: 67650604353     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.05.060     Document Type: Article

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