Microdeposition of metal and oxide structures using ultrashort laser pulses

Applied Physics A: Materials Science and Processing

Volumn 66, Issue 5, 1998, Pages 579-582

  Zergioti, I ^a   Mailis, S ^a   Vainos, N A ^a   Papakonstantinou, P ^a   Kalpouzos, C ^a   Grigoropoulos, C P ^a,b   Fotakis, C ^a,c  

^a INSTITUTE OF COMPUTER SCIENCE   (Greece)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CRETE   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; CRYSTAL MICROSTRUCTURE; DEPOSITION; EXCIMER LASERS; INDIUM COMPOUNDS; LASER ABLATION; LASER PULSES; THERMAL DIFFUSION IN SOLIDS;

INDIUM OXIDE; MICRODEPOSITION;

MICROELECTRONIC PROCESSING;

EID: 0032075345     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050717     Document Type: Article

References (15)

1. J. Bohandy, B.F. Kim, F.J. Adrian: J. Appl. Phys. 60(4), 1538 (1986)
2. J. Bohandy, B.F. Kim, F.J. Adrian, A.N. Jette: J. Appl. Phys. 63(4), 1158 (1988)
3. E. Fogarassy, C. Fuchs, F. Kerherve, G. Hauchecorne, J. Perriere: J. Mater. Res. 4(5), 1082 (1989)
4. E. Fogarassy, C. Fuchs, F. Kerherve, G. Hauchecorne, J. Perriere: J. Appl. Phys. 66(1), 457 (1989)
5. S.M. Pimenov, G.A. Shafeev, A.A. Smolin, V.I. Konov, B.K. Vodolaga: Appl. Surf. Sci. 86, 208 (1995)
6. C.C. Poon, A.C. Tam: CLEO Digest 9, 377 (1996)
7. H. Esrom, J.-Y. Zhang, U. Kogelschatz, A.J. Pedraza: Appl. Surf. Sci. 86, 202 (1995)
8. Z. Kantor, Z. Toth, T. Szorenyi: Appl. Phys. A 54, 170 (1992)
9. V. Schultze, M. Wagner: Appl. Surf. Sci. 52, 303 (1991)
10. S. Latsch, H. Hiraoka, W. Nieveen, J. Bargon: Appl. Surf. Sci. 81, 183 (1994)
11. I.-Y. Sandy Lee, W.A. Tolbert, D.D. Dlott, M.M. Doxtader, D.M. Foley, D.R. Arnold, E.W. Ellis: J. Imaging Sci. Technol. 36(2), 180 (1992)
12. C. Grivas, D.S. Gill, S. Mailis, L. Boutsikans, N.A. Vainos: Appl. Phys. A 65, 1 (1997)
13. N.A. Vainos, S. Mailis, S. Pissadakis, L. Boutsikaris, P.J.M. Parmiter, P. Dainty, T.J. Hall: Appl. Opt. 35, 6304 (1996)
14. X. Liu, D. Du, G. Mourou: IEEE J. Quantum Electron. QE-33(10), 1706 (1997)
15. S. Mailis, L. Boutsikaris, N.A. Vainos, C. Xirouhaki, G. Vasiliou, N. Garawal, G. Kiriakidis, H. Fritzsche: Appl. Phys. Lett. 69, 2459 (1996)