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Volumn 11, Issue 4, 2008, Pages 126-130
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Structural and optical properties of AlN/Si system
a
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Author keywords
Grazing incidence X ray diffraction; Interface; Nitrides
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Indexed keywords
AFM;
ALN;
BAND GAPS;
GRAZING INCIDENCE X-RAY DIFFRACTION;
INDUCED DISSOCIATION;
INTERFACE;
ION IRRADIATION;
ION-BEAM SPUTTERING;
IRRADIATED FILMS;
IRRADIATED SAMPLES;
KUBELKA-MUNK;
METAL CONTENT;
NITRIDE FILMS;
NITROGEN DIFFUSION;
OPTICAL APPLICATIONS;
OPTICAL SPECTROSCOPY;
SI(1 0 0);
STRUCTURAL AND OPTICAL PROPERTIES;
THICKNESS OF THE FILM;
UV-VIS SPECTRA;
WIDE BAND GAP;
X-RAY REFLECTOMETRY;
ALUMINA;
ALUMINUM;
ALUMINUM NITRIDE;
ATOMIC FORCE MICROSCOPY;
ATOMIC SPECTROSCOPY;
DIFFRACTION;
ENERGY GAP;
FILM PREPARATION;
GOLD;
ION BEAMS;
IONS;
IRRADIATION;
NITRIDES;
OPTICAL MICROSCOPY;
OPTICAL PROPERTIES;
REFLECTION;
SPUTTERING;
X RAY DIFFRACTION;
X RAY DIFFRACTION ANALYSIS;
OPTICAL FILMS;
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EID: 67650541326
PISSN: 13698001
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mssp.2009.05.003 Document Type: Article |
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Times cited : (7)
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References (20)
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