Design and fabrication of MEMS-based microneedle arrays for medical applications

Microsystem Technologies

Volumn 15, Issue 7, 2009, Pages 1073-1082

  Zhang, Peiyu ^a   Dalton, Colin ^a   Jullien, Graham A ^a  

^a UNIVERSITY OF CALGARY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BLIND HOLES; CYLINDRICAL BODIES; ETCH STOP; FLUID FLOW; MICRONEEDLE ARRAYS; NEEDLE LENGTH; SHARP TIP;

DEBRIS; FABRICATION; FLOW OF FLUIDS; MEDICAL APPLICATIONS; MEMS; MICROELECTROMECHANICAL DEVICES;

NEEDLES;

EID: 67650417889     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0883-5     Document Type: Article

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