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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 4, 2009, Pages 996-1000

Structural, electrical, and optical properties of antimony-doped tin oxide films prepared at room temperature by radio frequency magnetron sputtering for transparent electrodes

(3) Lee, Sung Uk a Hong, Byungyou a Choi, Won Seok b

a Sungkyunkwan University (South Korea)

b Hanbat National University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY-DOPED TIN OXIDE; CORNING GLASS; DEPOSITED FILMS; GRAIN SIZE; OPTICAL TRANSMITTANCE; POLYCRYSTALLINE; PREFERRED ORIENTATIONS; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-POWER; ROOM TEMPERATURE; SCHERRER EQUATIONS; TETRAGONAL STRUCTURE; TRANSPARENT ELECTRODE; VISIBLE-WAVELENGTH RANGE; WORKING PRESSURES; XRD SPECTRA;

ANTIMONY; ELECTRIC PROPERTIES; FILM PREPARATION; MAGNETRON SPUTTERING; MAGNETRONS; OPTICAL PROPERTIES; RADIO; RADIO WAVES; SURFACE ROUGHNESS; TIN; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

OXIDE FILMS;

EID: 67650330576 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3139891 Document Type: Article

Times cited : (22)

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