Annealing effects on properties of antimony tin oxide thin films deposited by RF reactive magnetron sputtering

Surface and Coatings Technology

Volumn 184, Issue 2-3, 2004, Pages 188-193

  Huang, Jow Lay ^a   Pan, Yi ^b   Chang, Jia Yuan ^a   Yau, Bao Shun ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

Annealing; Antimony tin oxide; Atmosphere; Sputtering

Indexed keywords

ANNEALING; ANTIMONY ALLOYS; MAGNETRON SPUTTERING; NITROGEN; OPTICAL PROPERTIES;

GLASS SUBSTRATES; UNANNEALING FILMS;

THIN FILMS;

ANNEALING; ANTIMONY; CARBON; CORROSION INHIBITING COATING; FILM;

EID: 2642575784     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.11.004     Document Type: Article

References (19)

1. Chopra K.L. Major S. Pandya D.K. Thin Solid Films 102 1983 1
2. Fang Y.K. Lee J.J. Thin Solid Films 169 1989 51
3. Angelis L.D. Minnaja N. Sensor Actuator B3 1991 197
4. Ansari S.G. Gosavi S.W. Gangal S.A. Karekar R.N. Aiyer R.C. J. Mater. Sci. Mater. Electron. 8 1997 23
5. Wan C.F. McGrath R.D. Keenan W.F. Frank S.N. J. Electrochem. Soc. 136 5 1989 1459
6. Reddy S. Malik A.K. Jawalekar S.R. Thin Solid Films 143 1986 113
7. Mizuhashi M. J. Non-Cryst. Solids 38 1980 329
8. Fraser D.B. Cook H.D. J. Electrochem. Soc. 119 1972 1368
9. Carlson D.E. J. Electrochem. Soc. 122 1975 1334
10. Martin N. Rousselot C. Rondot D. Palmino F. Mercier R. Thin Solid Films 300 1997 113-121
11. Arai T. J. Phys. Soc. Jpn. 15 5 1960 916
12. Elliott D. Zellmer D.L. Laitinen H.A. J. Electrochem. Soc. 117 1970 1343
13. Rohatgi A. Viverito T.R. Slack L.H. J. Am. Ceram. Soc. 57 6 1974 278
14. Carroll A.F. Slack L.H. J. Electrochem. Soc. 123 12 1976 1889
15. Murty N.S. Jawalekar S.R. Thin Solid Films 108 1983 277
16. Terrier C. Chatelon J.P. Roger J.A. Thin solid Films 295 1997 95
17. Wulff H. Quaas M. Steffen H. Hippler R. Thin Solid Films 377-378 2000 418-424
18. Igasaki Y. Saito H. Thin Solid Films 199 1991 223
19. Hou Y.Q. Zhuang D.M. Zhang G. Zhao M. Wu M.S. Appl. Surf. Sci. 218 2003 97-105