Fabrication and characterization of surface micromachined stacked transformer on glass substrate

Microelectronic Engineering

Volumn 86, Issue 10, 2009, Pages 2020-2025

  Yunas, Jumril ^a   Hamzah, Azrul Azlan ^a   Majlis, Burhanuddin Yeop ^a  

^a INSTITUTE OF MICROENGINEERING AND NANOELECTRONICS IMEN   (Malaysia)

Author keywords

3 dimensional RF MEMS; Glass substrate; S Parameter; Stacked transformer; Voltage gain

Indexed keywords

3-DIMENSIONAL RF-MEMS; GLASS SUBSTRATE; S-PARAMETER; STACKED TRANSFORMER; VOLTAGE GAIN;

FABRICATION; GAIN MEASUREMENT; MEMS; MICROELECTROMECHANICAL DEVICES; SCATTERING PARAMETERS; SUBSTRATES; SURFACE MICROMACHINING;

GLASS;

EID: 67649945956     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.12.091     Document Type: Article

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