Comparative study of stack interwinding micro-transformers on silicon monolithic

Microelectronics Journal

Volumn 39, Issue 12, 2008, Pages 1564-1567

  Yunas, Jumril ^a   Yeop Majlis, Burhanuddin ^a  

^a UNIVERSITI KEBANGSAAN MALAYSIA   (Malaysia)

Author keywords

3 D RF device; Micro transformer; Silicon monolithic; Surface micro machining

Indexed keywords

CRYSTALLOGRAPHY; MICROMACHINING; SILICON; SMELTING; THREE DIMENSIONAL;

3-D RF DEVICE; COIL STRUCTURES; COMPARATIVE STUDIES; FUTURE DEVELOPMENTS; INDUCTANCE VALUES; LAYER STRUCTURES; LUMPED ELEMENTS; MACHINING TECHNIQUES; MICRO-TRANSFORMER; MONOLITHIC SUBSTRATES; OPERATING FREQUENCIES; PARASITIC CAPACITANCES; RF DEVICES; SMALL COILS;

MACHINING;

EID: 56049125778     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2008.02.026     Document Type: Article

References (10)

1. Long J.R. Monolithic transformers for silicon RF IC design. IEEE J. Solid State Circuits 35 9 (2000) 1368-1382
2. Chong K., and Xie Y.H. High performance on-chip transformer. IEEE Electron. Device Lett. 26 8 (2005) 557-559
3. Arshak K.I. Development of high frequency coreless transformer using thick film polymer technology. Microelectron. J. 30 (1999)
4. Park J.Y. Packaging compatible microtransformers on a silicon substrate. IEEE Trans. Adv. Packaging 26 2 (2003)
5. Zolfaghari A., and Razavi B. Stacked inductors and transformers in CMOS technology. IEEE J. Solid State Circuits 36 4 (2001)
6. Ribas R.P., Lescot J., and Ndagijimana F. Micromachined microwave planar spiral inductors and transformers. IEEE Trans. Microwave Theory Tech. 48 8 (2000)
7. Yue C.P., and Wong S.S. On-chip spiral inductors with pattern ground shields for Si-based RFIC's. IEEE J. Solid-State Circuits 13 (1998) 1743-1752
8. Park J.Y., and Bu J.U. Packaging compatible microtransformers on a silicon substrate. IEEE Trans. Adv. Packaging 26 2 (2003) 160-164
9. Greenhouse H.M. Design of planar rectangular microelectronic inductors. IEEE Trans. of Parts Hybrids Packaging 10 2 (1974)
10. Yue C.P., and Wong S.S. Physical modeling of spiral inductor on silicon. IEEE Trans. Electron. Devices 47 3 (2000) 560-568