Conductive and transparent Bi-doped ZnO thin films prepared by rf magnetron sputtering

Surface and Coatings Technology

Volumn 203, Issue 24, 2009, Pages 3750-3753

  Jiang, Minhong ^a   Liu, Xinyu ^a   Wang, Hua ^a  

^a GUILIN UNIVERSITY OF ELECTRONIC TECHNOLOGY   (China)

Author keywords

Bi doping; Optical and electronic properties; Rf magnetron sputtering; Transparent conductive thin films; ZnO

Indexed keywords

BI-DOPING; OPTICAL AND ELECTRONIC PROPERTIES; RF MAGNETRON SPUTTERING; TRANSPARENT CONDUCTIVE THIN FILMS; ZNO;

ARGON; DOPING (ADDITIVES); ELECTRIC PROPERTIES; ELECTRONIC PROPERTIES; MAGNETRON SPUTTERING; MAGNETRONS; METALLIC FILMS; OPTICAL CONDUCTIVITY; OPTICAL FILMS; PRESSURE EFFECTS; SEMICONDUCTING ZINC COMPOUNDS; SUBSTRATES; THIN FILMS; ZINC OXIDE;

CONDUCTIVE FILMS;

EID: 67649859267     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.06.014     Document Type: Article

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