Extremely transparent and conductive ZnO:Al thin films prepared by photo-assisted metalorganic chemical vapor deposition (photo-MOCVD) using AlCl3(6H2O) as new doping material

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 8 SUPPL. B, 1997, Pages

  Myong, Seung Yeop ^a   Baik, Seung Jac ^a   Lee, Chang Hyun ^a   Cho, Woo Young ^a   Lim, Koeng Su ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Aqueous solution of AlCl3(6H2O); Excellent transmittance; Photo MOCVD; TCO; Wide bandgap; ZnO:Al

Indexed keywords

ALUMINUM; ALUMINUM COMPOUNDS; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY OF SOLIDS; ENERGY GAP; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PHOTOCHEMICAL REACTIONS; SOLAR CELLS; SOLUTIONS; THIN FILM DEVICES; TRANSPARENCY; ZINC OXIDE;

ALUMINUM CHLORIDE HYDRATE;

CONDUCTIVE FILMS;

EID: 0031207163     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l1078     Document Type: Article

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