Experimental study on properties of radio frequency He/CF 4/O2 discharges at atmospheric pressure

Plasma Sources Science and Technology

Volumn 18, Issue 2, 2009, Pages

  Kimura, Takashi ^a   Tanahashi, Hiroki ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED VOLTAGES; ATOMIC FLUORINE; DISSIPATED POWER; EXPERIMENTAL STUDIES; FLUORINE ATOMS; GAP LENGTH; MIXTURE RATIO; OPTICAL MEASUREMENT; PLANAR ELECTRODE; RADIO FREQUENCIES;

ATMOSPHERIC PRESSURE; ATOMS; FLUORINE; HELIUM; OPTICAL DATA PROCESSING; ORGANIC POLYMERS; OZONE; RADIO; RADIO WAVES; TITRATION;

ELECTRIC DISCHARGES;

EID: 67649845488     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/2/025002     Document Type: Article

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