One- and two-dimensional laser induced fluorescence at oblique incidence

Plasma Sources Science and Technology

Volumn 18, Issue 2, 2009, Pages

  Biloiu, Ioana A ^a   Scime, Earl E ^a   Biloiu, Costel ^b  

^a WEST VIRGINIA UNIVERSITY   (United States)

^b VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION MECHANISMS; DIAGNOSTIC TECHNIQUES; HELICON PLASMA SOURCE; ION POPULATION; ION VELOCITY DISTRIBUTION FUNCTION; KEY CHARACTERISTICS; LASER INDUCED FLUORESCENCE; LASER INJECTION; LOCAL MAGNETIC FIELD; MEASUREMENT LOCATIONS; OBLIQUE INCIDENCE;

DISTRIBUTION FUNCTIONS; FLUORESCENCE; HELICONS; ION BEAMS; LASER OPTICS; LASER PRODUCED PLASMAS; LASERS; MAGNETIC FIELDS; PLASMA SOURCES; PLASMA STABILITY; TOMOGRAPHY; TWO DIMENSIONAL; VELOCITY CONTROL;

IONS;

EID: 67649833744     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/2/025012     Document Type: Article

References (60)

1. Stern R A and Johnson J A III 1975 Phys. Rev. Lett. 34 1548
2. Burgess D D and Skinner C H 1974 J. Phys. B: At. Mol. Phys. 7 L297
3. Foley E and Levinton F 2004 Rev. Sci. Instrum. 75 3462
4. Barnat E V and Hebner G A 2004 Appl. Phys. Lett. 85 3393
5. Takizawa K, Kono A and Sasaki K 2007 Appl. Phys. Lett. 90 011503
6. Noonan W, Jones T and Ottinger P 1997 Rev. Sci. Instrum. 68 1032
7. Severn G D, Edrich D A and McWilliams R 1998 Rev. Sci. Instrum. 69 10
8. Boivin R F and Scime E E 2003 Rev. Sci. Instrum. 74 4352
9. Amorim J, Baravian G and Jolly J 2000 J. Phys. D: Appl. Phys. 33 R51
10. Ochkin V N, Savinov S Y, Tskhai S N, Czarnetzki U, von der Gathen V S and Döbele H F 1998 IEEE Trans Plasma Sci. 26 1502
11. Sasaki K and Okamoto M 2003 Appl. Phys. Lett. 83 1935
12. Aanesland A, Liard L, Leroy G, Jolly J and Chabert P 2007 Appl. Phys. Lett. 91 121502
13. Dillece G, Ambrico P F and De Benedictis S 2007 Plasma Sources Sci. Technol. 16 511
14. Levinton F and Trintchouk F 2001 Rev. Sci. Instrum. 72 898
15. Stopper U, Linder P and Schumacher U 2007 Rev. Sci. Instrum. 78 043508
16. Nafarizal N, Takada N and Sasaki K 2008 J. Phys. D: Appl. Phys. 41 035206
17. McWilliams R and Koslover R 1987 Phys. Rev. Lett. 58 37
18. McWilliams R, Boehmer H, Edrich D, Zhao L and Zimmerman D 2006 Thin Solid Films 506 665
19. Biloiu I A, Scime E E, Biloiu C and Cohen S A 2008 IEEE Trans. Plasma Sci. 36 1216
20. Bachet G, Skiff F, Dindelegan M, Doveil F and Stern R A 1998 Phys. Rev. Lett. 80 3260
21. Scime E, Biloiu C, Compton C, Doss F, Ventura D, Heard J, Choueiri E and Spektor R 2005 Rev. Sci. Instrum. 76 026107
22. Jacobs B, Gekelman W, Pribyl P, Barnes M and Kilgore M 2007 Appl. Phys. Lett. 91 161505
23. Biloiu I A and Scime E E 2008 IEEE Trans. Plasma Sci. 36 1376
24. Koslover R and McWilliams R 1986 Rev. Sci. Instrum. 57 2441
25. Ruyten W M and Keefer D 1993 AIAA J. 31 2083
26. Zintl M and McWilliams R 1994 Rev. Sci. Instrum. 65 2574
27. Williams G J jr, Smith T B, Domonkos M T, Gallimore A D and Drake R P 2000 IEEE Trans. Plasma Sci. 28 1664
28. Zimmerman D C, McWilliams R and Edrich D A 2005 Plasma Sources Sci. Technol. 14 581
29. Mazouffre S and Pawelec E 2009 J. Phys. D: Appl. Phys. 42 015203
30. Sadeghi N, Nakano T, Trevor D J and Gottscho R A 1991 J. Appl. Phys. 70 2552
31. Scime E, Hardin R, Biloiu C, Keesee A M and Sun X 2007 Phys. Plasmas 14 043505
32. Reynolds E W, Kaneko T, Koepke M and Hatakeyama R 2005 Phys. Plasmas 12 072103
33. Hill D H, Fornaca S and Wickham M G 1983 Rev. Sci. Instrum. 54 309
34. Barakat A R and Schunk R W 1981 J. Phys. D: Appl. Phys. 14 421
35. Schef P, Derkatch A, Lundin P, Mannervik S, Norlin L O, Rostohar D, Koyen P and Biemont E 2004 Eur. Phys. J. D 29 195
36. Vujnovic V and Wiese W L 1992 J. Phys. Chem. Ref. Data 21 919
37. Ramm A G and Katsevich A I The Radon Transform and Local Tomography (Boca Raton, FL: CRC Press)
38. Gaskill J D 1978 Linear Systems, Fourier Transforms, and Optics (New York: Wiley)
39. Bronnikov A V 2002 J. Opt. Soc. Am. A 19 472
40. Charles C 2007 Plasma Sources Sci. Technol. 16 R1
41. Biloiu C, Sun X, Choueiri E, Doss F, Scime E, Heard J, Spector R and Ventura D 2005 Plasma Sources Sci. Technol. 14 766
42. Biloiu C, Scime E, Sun X and McGeehan B 2004 Rev. Sci. Instrum. 75 4296
43. Goecker M J and Goree J 1989 J. Vac. Sci. Technol. A 7 977
44. Skiff F and Bollinger J 2004 Phys. Plasmas 11 2972
45. Biloiu I A, Sun X and Scime E E 2006 Rev. Sci. Instrum. 77 10F301
46. Boivin R F 2003 Zeeman splitting for LIF transitions and deconvolution technique to extract the ion temperature EPAPS Deposited Document E-PHPAEN-10-003306
47. Salami H and Ross A J 2005 J. Mol. Spectrosc. 233 157
48. Bowles J, McWilliams R and Rynn N 1994 Phys. Plasmas 1 3814
49. Zhao L, Heidbrink W W, Boehmer H and McWilliams R 2005 Phys. Plasmas 12 052108
50. Gulick S L, Stansfield B L, Abou-Azaleh Z, Boucher C, Matte J P, Johnston T W and Mochand R 1990 J. Nucl. Mater. 176-177 1059
51. Severn G D, Wang X, Ko E and Hershkowitz N 2003 Phys. Rev. Lett. 90 145001
52. Claire N, Bachet G, Stroth U and Doveil F 2006 Phys. Plasmas 13 062103
53. Lee D, Hershkowitz N and Severn G 2007 Appl. Phys. Lett. 91 041505
54. McWilliams R and Edrich D 2003 Thin Solid Films 435 1
55. Borovsky J E 1984 J. Geophys. Res. 89 2251
56. Chang T, Crew G B, Retlerer J M and Jasperse J R 1989 IEEE Trans. Plasma Sci. 17 186
57. Zintl M, McWilliams R and Wolf N 1995 Phys. Plasmas 2 4432
58. Biloiu I A, Scime E E and Biloiu C 2008 Appl. Phys. Lett. 92 191502
59. Skiff F, Bachet G and Doveil F J 2001 Phys. Plasmas 8 3139
60. Phelps A V 1991 J. Chem. Ref. Data 20 557