Two-dimensional ion velocity distribution functions in inductively coupled argon plasma

Plasma Sources Science and Technology

Volumn 14, Issue 3, 2005, Pages 581-588

  Zimmerman, David C ^a   McWilliams, Roger ^b   Edrich, David A ^c  

^a Optical Sciences Company   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Scientific Applications and Research Associates (SARA) Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; IONS; MAGNETIC FIELD EFFECTS; TOMOGRAPHY; TWO DIMENSIONAL; VELOCITY MEASUREMENT;

BEAM ENERGY; ION BEAM SOURCE; ION VELOCITY DISTRIBUTION; OPTICAL TOMOGRAPHY;

INDUCTIVELY COUPLED PLASMA;

EID: 23844478833     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/14/3/022     Document Type: Article

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