Two-dimensional argon-ion velocity distributions in the expansion region of a helicon plasma source

IEEE Transactions on Plasma Science

Volumn 36, Issue 4 PART 1, 2008, Pages 1216-1217

  Biloiu, Ioana A ^a   Scime, Earl E ^a   Biloiu, Costel ^b   Cohen, Samuel A ^c  

^a WEST VIRGINIA UNIVERSITY   (United States)

^b VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES   (United States)

^c PRINCETON PLASMA PHYSICS LABORATORY   (United States)

Author keywords

Electric double layer; Helicon plasma; Ion beam; Ion velocity distribution function; Laser induced fluorescence tomography

Indexed keywords

ARGON; DIAGNOSTIC RADIOGRAPHY; HELICONS; IMAGING TECHNIQUES; INERT GASES; IONS; MAGNETIC FIELDS; MEDICAL IMAGING; PLASMA SOURCES; PLASMAS; TOMOGRAPHY; TWO DIMENSIONAL; VELOCITY CONTROL; VELOCITY DISTRIBUTION;

ARGON IONS; ELECTRIC DOUBLE LAYER; FAST IONS; HELICON PLASMA; HELICON PLASMAS; ION BEAM; ION POPULATIONS; ION VELOCITIES; ION VELOCITY DISTRIBUTION FUNCTION; LASER INDUCED FLUORESCENCE LIF); LASER INDUCED FLUORESCENCE TOMOGRAPHY; PLASMA SCIENCE;

DISTRIBUTION FUNCTIONS;

EID: 50249108857     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.917778     Document Type: Article

References (12)

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