Laser-induced fluorescence measurements in an inductively coupled plasma reactor

Applied Physics Letters

Volumn 91, Issue 16, 2007, Pages

  Jacobs, Brett ^a   Gekelman, Walter ^a   Pribyl, Pat ^a   Barnes, Michael ^b   Kilgore, Michael ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Intevac Inc   (United States)

^c Novellus Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; FLOW PATTERNS; FLUORESCENCE; INTERFEROMETERS; MICROWAVES; VELOCITY DISTRIBUTION;

INDUCTIVELY COUPLED PLASMA REACTORS; LASER-INDUCED FLUORESCENCE (LIF); MICROWAVE INTERFEROMETER; SPATIAL LOCATIONS;

INDUCTIVELY COUPLED PLASMA;

EID: 35548972947     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2801393     Document Type: Article

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