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Volumn 153, Issue , 2008, Pages 3-39

Chapter 1 History of Direct Aberration Correction

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE OPTICS; ASPHERICS; ELECTRON MICROSCOPES; ELECTRON MICROSCOPY; ELECTRONS; LENSES;

EID: 67649402131     PISSN: 10765670     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1076-5670(08)01001-X     Document Type: Chapter
Times cited : (31)

References (67)
  • 2
    • 9544248580 scopus 로고
    • Requirements contributing to the design of devices used in correcting electron lenses
    • Archard G.D. Requirements contributing to the design of devices used in correcting electron lenses. Br. J. Appl. Phys. 5 (1954) 294-299
    • (1954) Br. J. Appl. Phys. , vol.5 , pp. 294-299
    • Archard, G.D.1
  • 3
    • 4444308740 scopus 로고
    • A quadrupole octopole corrector for a 100 kV STEM
    • Beck V., and Crewe A.V. A quadrupole octopole corrector for a 100 kV STEM. Proc. Ann. Meeting EMSA 32 (1974) 426-427
    • (1974) Proc. Ann. Meeting EMSA , vol.32 , pp. 426-427
    • Beck, V.1    Crewe, A.V.2
  • 4
    • 0018496526 scopus 로고
    • A hexapole spherical aberration corrector
    • Beck V.D. A hexapole spherical aberration corrector. Optik 53 (1979) 241-255
    • (1979) Optik , vol.53 , pp. 241-255
    • Beck, V.D.1
  • 5
    • 0019072236 scopus 로고
    • Erprobung eines sphaerisch korrigierten Elektronenmikroskops
    • Bernhard W. Erprobung eines sphaerisch korrigierten Elektronenmikroskops. Optik 57 (1980) 73-94
    • (1980) Optik , vol.57 , pp. 73-94
    • Bernhard, W.1
  • 7
    • 84980116208 scopus 로고
    • Berechnung der Bahn von Kathodenstrahlen im axialsymmetrischen elektomagnetischen Felde
    • Busch H. Berechnung der Bahn von Kathodenstrahlen im axialsymmetrischen elektomagnetischen Felde. Ann. Phys. 4 (1927) 974-993
    • (1927) Ann. Phys. , vol.4 , pp. 974-993
    • Busch, H.1
  • 8
    • 0013344068 scopus 로고
    • Recherches sur l'optique électronique
    • Cotte M. Recherches sur l'optique électronique. Ann. Phys. (Paris) 10 (1938) 333-405
    • (1938) Ann. Phys. (Paris) , vol.10 , pp. 333-405
    • Cotte, M.1
  • 9
    • 0019280512 scopus 로고
    • Studies on sextupole correctors
    • Crewe A.V. Studies on sextupole correctors. Optik 57 (1980) 313-327
    • (1980) Optik , vol.57 , pp. 313-327
    • Crewe, A.V.1
  • 10
    • 0036409182 scopus 로고    scopus 로고
    • Some Chicago aberrations
    • Crewe A.V. Some Chicago aberrations. Microsc. Microanal. 8 Suppl. 2 (2002) 4-5
    • (2002) Microsc. Microanal. , vol.8 , Issue.SUPPL. 2 , pp. 4-5
    • Crewe, A.V.1
  • 11
    • 0345159471 scopus 로고
    • Correction of spherical aberration with combined quadrupole-octopole units
    • Titlbach M. (Ed), Czechoslovak Academy of Sciences, Prague
    • Deltrap J.M.H. Correction of spherical aberration with combined quadrupole-octopole units. In: Titlbach M. (Ed). "Proceedings of the Third European Regional Conference on Electron Microscopy, Prague" vol. A (1964), Czechoslovak Academy of Sciences, Prague 45-46
    • (1964) "Proceedings of the Third European Regional Conference on Electron Microscopy, Prague" , vol.A , pp. 45-46
    • Deltrap, J.M.H.1
  • 12
    • 0041815639 scopus 로고
    • Four quadrupole lenses as an analogue of an axially symmetric system
    • Dymnikov A.D., and Yavor S.Y. Four quadrupole lenses as an analogue of an axially symmetric system. Sov. Phys. Tech. Phys. 8 (1963) 639-643
    • (1963) Sov. Phys. Tech. Phys. , vol.8 , pp. 639-643
    • Dymnikov, A.D.1    Yavor, S.Y.2
  • 13
    • 0018982897 scopus 로고
    • Elektrische Versorgung eines elektronenoptischen Korrektivs
    • Fey G. Elektrische Versorgung eines elektronenoptischen Korrektivs. Optik 55 (1980) 55-65
    • (1980) Optik , vol.55 , pp. 55-65
    • Fey, G.1
  • 15
    • 0042849045 scopus 로고
    • The outlook for holography
    • Gabor D. The outlook for holography. Optik 28 (1969) 437-441
    • (1969) Optik , vol.28 , pp. 437-441
    • Gabor, D.1
  • 16
    • 67649405081 scopus 로고
    • Elektronenbewegung als optisches problem
    • Busch H., and Brueche E. (Eds), Barth, Leipzig
    • Glaser W. Elektronenbewegung als optisches problem. In: Busch H., and Brueche E. (Eds). "Beitraege zur Elektro-nenoptik" (1937), Barth, Leipzig 24-33
    • (1937) "Beitraege zur Elektro-nenoptik" , pp. 24-33
    • Glaser, W.1
  • 17
    • 30244490611 scopus 로고
    • Ueber ein von sphaerischer Aberration freies Magnetfeld
    • 734-735.
    • Glaser W. Ueber ein von sphaerischer Aberration freies Magnetfeld. Z. Physik 116 (1940) 19-33 734-735.
    • (1940) Z. Physik , vol.116 , pp. 19-33
    • Glaser, W.1
  • 18
    • 0020279790 scopus 로고
    • Design and test of an electric and magnetic dodecapole lens
    • Haider M., Bernhardt W., and Rose H. Design and test of an electric and magnetic dodecapole lens. Optik 63 (1982) 9-23
    • (1982) Optik , vol.63 , pp. 9-23
    • Haider, M.1    Bernhardt, W.2    Rose, H.3
  • 19
    • 0029321321 scopus 로고
    • Correction of the spherical aberration of a 220 kV TEM by means of a hexapole corrector
    • Haider M., Braunshausen G., and Schwan E. Correction of the spherical aberration of a 220 kV TEM by means of a hexapole corrector. Optik 99 (1995) 167-179
    • (1995) Optik , vol.99 , pp. 167-179
    • Haider, M.1    Braunshausen, G.2    Schwan, E.3
  • 20
    • 0031797093 scopus 로고    scopus 로고
    • Towards 0.1nm resolution with the first spherically corrected transmission electron microscope
    • Haider M., Rose H., Uhlemann S., Kabius B., and Urban K. Towards 0.1nm resolution with the first spherically corrected transmission electron microscope. J. Electron Microscopy 47 (1998) 395-405
    • (1998) J. Electron Microscopy , vol.47 , pp. 395-405
    • Haider, M.1    Rose, H.2    Uhlemann, S.3    Kabius, B.4    Urban, K.5
  • 23
    • 0001526521 scopus 로고
    • The geometrical aberrations of general electron optical systems, I and II
    • Hawkes P.W. The geometrical aberrations of general electron optical systems, I and II. Philos. Trans. Roy. Soc. A 257 (1965) 479-552
    • (1965) Philos. Trans. Roy. Soc. A , vol.257 , pp. 479-552
    • Hawkes, P.W.1
  • 24
    • 0017141350 scopus 로고
    • A magnetic flux stabilizer for the objective lens of a corrected electron microscope
    • Heinzerling J. A magnetic flux stabilizer for the objective lens of a corrected electron microscope. J. Physics E 9 (1976) 131-134
    • (1976) J. Physics E , vol.9 , pp. 131-134
    • Heinzerling, J.1
  • 26
    • 0010470687 scopus 로고
    • Technologische Voraussetzungen fuer die Verbesserung der Korrektur von Elektronenlinsen
    • Hely H. Technologische Voraussetzungen fuer die Verbesserung der Korrektur von Elektronenlinsen. Optik 60 (1982) 307-326
    • (1982) Optik , vol.60 , pp. 307-326
    • Hely, H.1
  • 27
    • 0037917490 scopus 로고    scopus 로고
    • Outline of an electron monochromator with small Boersch effect
    • Calderon H.A., and Yacaman M.J. (Eds), Institute of Physics, Bristol and Philadelphia
    • Kahl F., and Rose H. Outline of an electron monochromator with small Boersch effect. In: Calderon H.A., and Yacaman M.J. (Eds). "Proceedings of the 14th International Conference on Electron Microscopy," vol. 1 (1998), Institute of Physics, Bristol and Philadelphia 71-72
    • (1998) "Proceedings of the 14th International Conference on Electron Microscopy," , vol.1 , pp. 71-72
    • Kahl, F.1    Rose, H.2
  • 28
    • 0009455280 scopus 로고
    • Achromatic quadrupole electron lenses
    • Kelman V.M., and Yavor S.Y. Achromatic quadrupole electron lenses. Zh. Tekh. Fiz. 31 (1961) 1439-1442
    • (1961) Zh. Tekh. Fiz. , vol.31 , pp. 1439-1442
    • Kelman, V.M.1    Yavor, S.Y.2
  • 29
    • 0017499618 scopus 로고
    • Erprobung eines elektronenoptischen Achro-mators
    • Koops H., Kuck G., and Scherzer O. Erprobung eines elektronenoptischen Achro-mators. Optik 48 (1977) 225-236
    • (1977) Optik , vol.48 , pp. 225-236
    • Koops, H.1    Kuck, G.2    Scherzer, O.3
  • 35
    • 0345006383 scopus 로고
    • Second-rank aberration sof a magnetic imaging filter: measurement and correction
    • Kujawa S., Krahl D., Niedrig H., and Zeitler E. Second-rank aberration sof a magnetic imaging filter: measurement and correction. Optik 86 (1990) 39-46
    • (1990) Optik , vol.86 , pp. 39-46
    • Kujawa, S.1    Krahl, D.2    Niedrig, H.3    Zeitler, E.4
  • 36
    • 0022721922 scopus 로고
    • Test and improved design of a corrected imaging magnetic energy filter
    • 1986
    • Lanio S., Rose H., and Krahl D. Test and improved design of a corrected imaging magnetic energy filter. Optik 73 (1986) 56-68 1986
    • (1986) Optik , vol.73 , pp. 56-68
    • Lanio, S.1    Rose, H.2    Krahl, D.3
  • 37
    • 67649394649 scopus 로고
    • Das praktische Aufloesungsvermoegen von Elektronenmikroskopen
    • Meyer W.E. Das praktische Aufloesungsvermoegen von Elektronenmikroskopen. Optik 18 (1961) 101-114
    • (1961) Optik , vol.18 , pp. 101-114
    • Meyer, W.E.1
  • 38
    • 9544251316 scopus 로고
    • Elektronenmikroskopische Bilder mit einem nach O. Scherzer sphaerisch korrigierten Objektiv
    • Moellenstedt G. Elektronenmikroskopische Bilder mit einem nach O. Scherzer sphaerisch korrigierten Objektiv. Optik 13 (1956) 209-215
    • (1956) Optik , vol.13 , pp. 209-215
    • Moellenstedt, G.1
  • 40
    • 0017936265 scopus 로고
    • Magnetische Abschirmung eines korrigierten Elektrononmikroskops
    • Pejas W. Magnetische Abschirmung eines korrigierten Elektrononmikroskops. Optik 50 (1978) 61-72
    • (1978) Optik , vol.50 , pp. 61-72
    • Pejas, W.1
  • 41
    • 0015673759 scopus 로고
    • Korrektur der Oeffnungsfehler elektronenoptischer Systeme mit krummer Achse und durchgehend astigmatismusfreien Gausschen Bahnen
    • Plies E. Korrektur der Oeffnungsfehler elektronenoptischer Systeme mit krummer Achse und durchgehend astigmatismusfreien Gausschen Bahnen. Optik 38 (1973) 502-518
    • (1973) Optik , vol.38 , pp. 502-518
    • Plies, E.1
  • 42
    • 0011608152 scopus 로고
    • Über die axialen Bildfehler magnetischer Ablenksysteme mit krummer Achse
    • Plies E., and Rose H. Über die axialen Bildfehler magnetischer Ablenksysteme mit krummer Achse. Optik 34 (1971) 171-190
    • (1971) Optik , vol.34 , pp. 171-190
    • Plies, E.1    Rose, H.2
  • 43
    • 5244303240 scopus 로고
    • Der elektrostatische Stigmator, ein Korrektiv fuer astigmatische Elektronenlinsen
    • Rang O. Der elektrostatische Stigmator, ein Korrektiv fuer astigmatische Elektronenlinsen. Optik 5 (1949) 518-530
    • (1949) Optik , vol.5 , pp. 518-530
    • Rang, O.1
  • 44
    • 34250914001 scopus 로고
    • Ueber die sphaerische Aberration bei elektronenoptischer Abbildung
    • Recknagel A. Ueber die sphaerische Aberration bei elektronenoptischer Abbildung. Z. Physik 117 (1941) 67-73l
    • (1941) Z. Physik , vol.117
    • Recknagel, A.1
  • 46
    • 0142133985 scopus 로고
    • Abbildungseigenschaften sphaerisch korrigierter elektrononoptischer Achromate
    • Rose H. Abbildungseigenschaften sphaerisch korrigierter elektrononoptischer Achromate. Optik 33 (1971) 1-24
    • (1971) Optik , vol.33 , pp. 1-24
    • Rose, H.1
  • 47
    • 0001133023 scopus 로고
    • Elektronenoptische Aplanate
    • Rose H. Elektronenoptische Aplanate. Optik 34 (1971) 285-311
    • (1971) Optik , vol.34 , pp. 285-311
    • Rose, H.1
  • 48
    • 0017985524 scopus 로고
    • Aberration correction of homogeneous magnetic deflection fields
    • Rose H. Aberration correction of homogeneous magnetic deflection fields. Optik 51 (1978) 15-38
    • (1978) Optik , vol.51 , pp. 15-38
    • Rose, H.1
  • 49
    • 0009759566 scopus 로고
    • Correction of aperture aberrations in magnetic systems with threefold symmetry
    • Rose H. Correction of aperture aberrations in magnetic systems with threefold symmetry. Nucl. Instr. Meth. 187 (1981) 187-199
    • (1981) Nucl. Instr. Meth. , vol.187 , pp. 187-199
    • Rose, H.1
  • 50
    • 1042304378 scopus 로고    scopus 로고
    • Outline of an ultracorrector compensating for all primary chromatic and geometrical aberrations of charged-particle lenses
    • Rose H. Outline of an ultracorrector compensating for all primary chromatic and geometrical aberrations of charged-particle lenses. Nucl. Instr. Meth. Phys. Res. A519 (2004) 12-27
    • (2004) Nucl. Instr. Meth. Phys. Res. , vol.A519 , pp. 12-27
    • Rose, H.1
  • 51
    • 67649415393 scopus 로고
    • Correction of aberrationsin electron optical systems with curved axis
    • Hawkes P.W. (Ed), Acad. Press, London
    • Rose H., and Plies E. Correction of aberrationsin electron optical systems with curved axis. In: Hawkes P.W. (Ed). "Image Processing and Computer-aided Design in Electron Optics" (1973), Acad. Press, London 344-370
    • (1973) "Image Processing and Computer-aided Design in Electron Optics" , pp. 344-370
    • Rose, H.1    Plies, E.2
  • 52
    • 0016058879 scopus 로고
    • Entwurf eines fehlerarmen magnetischen Energie-Analysators
    • Rose H., and Plies E. Entwurf eines fehlerarmen magnetischen Energie-Analysators. Optik 40 (1974) 336-341
    • (1974) Optik , vol.40 , pp. 336-341
    • Rose, H.1    Plies, E.2
  • 54
    • 0242278253 scopus 로고
    • Ueber einige Fehler von Elektronenlinsen
    • Scherzer O. Ueber einige Fehler von Elektronenlinsen. Z. Physik 101 (1936) 593-603
    • (1936) Z. Physik , vol.101 , pp. 593-603
    • Scherzer, O.1
  • 55
    • 58049155018 scopus 로고
    • Berechnung der Bildfehler dritter Ordnung nach der Bahnmethode
    • Busch H., and Brueche E. (Eds), Barth, Leipzig
    • Scherzer O. Berechnung der Bildfehler dritter Ordnung nach der Bahnmethode. In: Busch H., and Brueche E. (Eds). "Beitraege zur Elektronenoptik" (1937), Barth, Leipzig 33-41
    • (1937) "Beitraege zur Elektronenoptik" , pp. 33-41
    • Scherzer, O.1
  • 56
    • 0001160818 scopus 로고
    • Sphaerische und chromatische Korrektur von Elektronenlinsen
    • Scherzer O. Sphaerische und chromatische Korrektur von Elektronenlinsen. Optik 2 (1947) 114-132
    • (1947) Optik , vol.2 , pp. 114-132
    • Scherzer, O.1
  • 57
    • 67649391267 scopus 로고
    • Private communication
    • Scherzer, O. (1947b). Private communication.
    • (1947)
    • Scherzer, O.1
  • 58
    • 1042300844 scopus 로고
    • Die sphaerische Korrektur von Elektronenlinsen mittels nicht rotations-symmetrischer Abbildungselemente
    • Seeliger R. Die sphaerische Korrektur von Elektronenlinsen mittels nicht rotations-symmetrischer Abbildungselemente. Optik 8 (1951) 311-317
    • (1951) Optik , vol.8 , pp. 311-317
    • Seeliger, R.1
  • 59
    • 30244559760 scopus 로고
    • A magnetic lens of special field form for β- and γ-ray investigations; designs and applications
    • Siegbahn K. A magnetic lens of special field form for β- and γ-ray investigations; designs and applications. Philos. Mag. 37 (1946) 162-184
    • (1946) Philos. Mag. , vol.37 , pp. 162-184
    • Siegbahn, K.1
  • 60
    • 0001500005 scopus 로고
    • Existenzbereiche rotationssymmetrischer Elektronenlinsen
    • Tretner W. Existenzbereiche rotationssymmetrischer Elektronenlinsen. Optik 16 (1959) 155-184
    • (1959) Optik , vol.16 , pp. 155-184
    • Tretner, W.1
  • 61
    • 0028443920 scopus 로고
    • The MANDOLINE filter-a new high-performance imaging filter for sub-eV EFTEM
    • Uhlemann S., and Rose H. The MANDOLINE filter-a new high-performance imaging filter for sub-eV EFTEM. Optik 96 (1994) 163-178
    • (1994) Optik , vol.96 , pp. 163-178
    • Uhlemann, S.1    Rose, H.2
  • 62
    • 0032077383 scopus 로고    scopus 로고
    • Residual wave aberrations in the first aberration-corrected transmission electron microscope
    • Uhlemann S., and Haider M. Residual wave aberrations in the first aberration-corrected transmission electron microscope. Ultramicroscopy 72 (1998) 109-119
    • (1998) Ultramicroscopy , vol.72 , pp. 109-119
    • Uhlemann, S.1    Haider, M.2
  • 63
    • 48249156968 scopus 로고    scopus 로고
    • Studying atomic structures by aberration-corrected transmission electron microscopy
    • Urban K. Studying atomic structures by aberration-corrected transmission electron microscopy. Science 321 (2008) 505-510
    • (2008) Science , vol.321 , pp. 505-510
    • Urban, K.1
  • 64
    • 67649392718 scopus 로고    scopus 로고
    • s probe corrector for FEI TEM/STEM systems. In Abstracts of the Third TEAM Workshop, San Antonio.
    • s probe corrector for FEI TEM/STEM systems. In "Abstracts of the Third TEAM Workshop," San Antonio.
  • 65
    • 37949044568 scopus 로고
    • Aberration correction in a low-voltage SEM by a multipole corrector
    • Zach J., and Haider M. Aberration correction in a low-voltage SEM by a multipole corrector. Nucl. Instrum. Meth. Phys. Res. A 365 (1995) 316-325
    • (1995) Nucl. Instrum. Meth. Phys. Res. A , vol.365 , pp. 316-325
    • Zach, J.1    Haider, M.2
  • 66
    • 0003111585 scopus 로고
    • Design of a high-resolution low-voltage scanning electron microscope
    • Zach J. Design of a high-resolution low-voltage scanning electron microscope. Optik 83 (1989) 30-40
    • (1989) Optik , vol.83 , pp. 30-40
    • Zach, J.1
  • 67
    • 0018227155 scopus 로고
    • Coma-free alignment of high-resolution electron microscopes with the aid of optical diffractograms
    • Zemlin F., Weiss K., Schiske P., Kunath W., and Herrmann K.H. Coma-free alignment of high-resolution electron microscopes with the aid of optical diffractograms. Ultramicroscopy 3 (1977) 49-60
    • (1977) Ultramicroscopy , vol.3 , pp. 49-60
    • Zemlin, F.1    Weiss, K.2    Schiske, P.3    Kunath, W.4    Herrmann, K.H.5


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