Periodic structures prepared by two-beam interference method

Microelectronics Journal

Volumn 38, Issue 6-7, 2007, Pages 746-749

  Skriniarova J ^a   Pudis D ^b   Martincek I ^b   Kovac J ^a,c   Tarjanyi N ^b   Vesely M ^a   Turek, I ^b  

^a SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

^b UNIVERSITY OF ILINA   (Slovakia)

^c INTERNATIONAL LASER CENTER   (Slovakia)

Author keywords

Interference; Laser lithography; Periodic structure

Indexed keywords

GOLD COMPOUNDS; LIGHT INTERFERENCE; OPTOELECTRONIC DEVICES; PHOTORESISTORS;

2D PERIODIC STRUCTURE FABRICATION; 2D STRUCTURES; LASER LITHOGRAPHY; TWO BEAM INTERFERENCE METHOD;

PERIODIC STRUCTURES;

EID: 34547492867     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.04.004     Document Type: Article

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