A compliance-based microflow stabilizer

Journal of Microelectromechanical Systems

Volumn 18, Issue 3, 2009, Pages 539-546

  Yang, Bozhi ^a   Lin, Qiao ^b  

^a Infinia Corporation   (United States)

^b Department of Earth and Environmental Sciences   (United States)

Author keywords

Compliant membrane; Flow rectification; Flow stabilization; Fluid structure interaction; Lumped parameter model

Indexed keywords

FLOW RATE; FLUID DYNAMICS; FLUID STRUCTURE INTERACTION; FLUIDIC DEVICES; FLUIDS; STABILIZATION; STEADY FLOW; STRUCTURAL DYNAMICS; VIBRATIONS (MECHANICAL);

CHANNEL SECTIONS; COMPLIANT MEMBRANE; DEVICE CHARACTERISTICS; FLOW RECTIFICATION; FLOW STABILIZATION; FLUCTUATION FREQUENCY; FLUID FLOW; LUMPED PARAMETER MODELS; LUMPED-PARAMETER MODEL; MEMBRANE DEVICES; MEMBRANE VIBRATIONS; MICRO FLUIDIC SYSTEM; MICRO-FLOW; MICRO-FLUIDIC DEVICES; PASSIVE VIBRATION; PULSATING FLOW; SQUEEZE FILMS; UNDERFLOW;

MEMBRANES;

EID: 67549099811     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2021826     Document Type: Article

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