The design of an in-plane compliance structure for microfluidical systems

Sensors and Actuators, B: Chemical

Volumn 81, Issue 2-3, 2002, Pages 377-383

  Veenstra, T T ^a   Sharma, N R ^b   Forster, F K ^b   Gardeniers, J G E ^c   Elwenspoek, M C ^a   Van den Berg, A ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b UNIVERSITY OF WASHINGTON   (United States)

^c Micronit Microfluidics   (Netherlands)

Author keywords

Compliance; Liquid; Microfluidics; Micropumps; Pumps

Indexed keywords

MICROFLUIDICAL SYSTEMS;

BUBBLES (IN FLUIDS); COMPUTER SIMULATION; MICROMACHINING; PRESSURE EFFECTS; SILICON;

FLUIDIC DEVICES;

EID: 0037021784     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00964-9     Document Type: Article

References (11)

1. Design, fabrication and testing of fixed-valve micro pumps
2. Simulation of microfluid systems
3. Static and dynamic flow simulation of a KOH etched microvalve using the finite-element method
4. Design of a modular micropump based on anodic bonding
5. Design and simulation of an electrostatic micropump for drug delivery applications
6. Requirements of pumps used in microTAS