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Volumn 83, Issue 10, 2009, Pages 1240-1243
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ab-initio Study of the properties of Ti1-x-ySixAlyN solid solution
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Author keywords
Density functional theory; Hard coatings; Magnetron sputtering; Titanium aluminum silicon nitride
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Indexed keywords
AB INITIO;
BONDING CHARACTERISTICS;
CALCULATED VALUES;
COHESIVE ENERGIES;
DENSITY OF STATE;
ELASTIC PROPERTIES;
FIRST-PRINCIPLES CALCULATION;
FORMATION ENERGIES;
LATTICE PARAMETERS;
METASTABLE PHASE;
THEORETICAL RESULT;
TITANIUM ALUMINUM SILICON NITRIDE;
ALUMINA;
ALUMINUM;
ELASTIC CONSTANTS;
ELECTRONIC PROPERTIES;
HARD COATINGS;
LATTICE CONSTANTS;
MAGNETRONS;
METASTABLE PHASES;
SILICON;
SILICON NITRIDE;
TITANIUM;
TITANIUM NITRIDE;
DENSITY FUNCTIONAL THEORY;
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EID: 67349249119
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.vacuum.2009.03.011 Document Type: Article |
Times cited : (24)
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References (25)
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