Studies on laser ablation of low temperature co-fired ceramics (LTCC)

International Journal of Advanced Manufacturing Technology

Volumn 42, Issue 7-8, 2009, Pages 696-702

  Zhu, Jijun ^a   Yung, Winco K C ^b  

^a SOUTHEAST UNIVERSITY   (China)

^b HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

Laser ablation; LTCC; Microfluidic chip

Indexed keywords

GREEN TAPE; INFRARED LASER; INFRARED LASER ABLATION; LASER SOURCES; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC; MICROFLUIDIC CHIP; MICROWAVE INDUSTRY; ND: YAG; OPTICAL FIBRE; PLASTIC MATERIALS; SEM; TAPERED STRUCTURE; UV LASERS;

ANALYTIC EQUIPMENT; AUTOMOTIVE INDUSTRY; BIOCHIPS; EXCIMER LASERS; FLUIDIC DEVICES; GAS LASERS; GLASS INDUSTRY; INFRARED DEVICES; KRYPTON; LASER ABLATION; LASER APPLICATIONS; OPTICAL FIBERS; PULSED LASER DEPOSITION;

NEODYMIUM LASERS;

EID: 67349138252     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-008-1647-6     Document Type: Article

References (20)

1. DA LaVan T McGuire R Langer 2003 Small-scale systems for in vivo drug delivery Nat Biotechnol 21 1184 1191 (Pubitemid 37186175)
2. JW Hong SR Quake 2003 Integrated nanolitre systems Nat Biotechnol 21 1179 1183
3. M Ferrari 2005 Cancer nanotechnology: opportunities and challenges Nat Rev Cancer 5 161 171 (Pubitemid 40314948)
4. EM Lucchetta JH Lee LA Fu NH Patel RF Ismagilov 2005 Dynamics of Drosophila embryonic patterning network perturbed in space and time using micro fluidics Nature 434 1134 1138 (Pubitemid 40663492)
5. PS Dittrich A Manz 2006 Lab-on-a-chip: micro fluidics in drug discovery Nat Rev Drug Discovery 5 210 218 (Pubitemid 43336034)
6. MK Wei H Yang 2003 Cumulative heat effect in excimer laser ablation of polymer PC and ABS Int J Adv Manuf Technol 21 12 1029 1034
7. CT Pan H Yang MK Wei 2007 248 nm excimer laser drilling PI film for nozzle plate application Int J Adv Manuf Technol 34 9-10 889 897 (Pubitemid 47482166)
8. 2 gas sensor on low temperature cofiring ceramics Sens Actuators B 47 100 103 (Pubitemid 128442788)
9. RM Gongora LM Sola Laguna PJ Moffett JJ Santiago-Aviles 1999 The utilization of low temperature co-fired ceramics(LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor Sens Actuators A 73 215 221
10. PK Khanna B Hornbostel R Grimme W Schafer J Dorner 2004 Miniature pressure sensor and micromachined actuator structure based on low temperature cofired ceramics and piezoelectric material Mater Chem Phys 87 173 178
11. PK Khanna B Hornbostel M Burgard W Schafer J Dorner 2005 Studies on three dimensional moulding, bonding and assembling of low temperature cofired ceramics for MEMS and MST applications Mater Chem Phys 89 72 79
12. MAH Goldbach M Keusgen 2006 LTCC-based microchips for the electrochemical detection of phenolic compounds Sensor Actuator B Chem 120 346 351 (Pubitemid 44486676)
13. N Ibañez-Garcia RD Machado Gonçalves Z Mendes da Rocha MR Góngora-Rubio AC Seabra J Alonso Chamarro 2006 LTCC meso-analytical system for chloride ion determination in drinking waters Sensor Actuator B Chem 118 67 72 (Pubitemid 44287391)
14. TM Hansu Birol P Ryser 2006 Processing of graphite based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC) Sensor Actuator Phys 130/31 560 567 (Pubitemid 44063530)
15. J Zhu J Cheng SS Ang 2006 A low temperature co-fired ceramic mesofluidic separator J Phys: Conf Ser 34 734 739
16. K Jaroslaw D Andrzej LJ Golonka B Andrzej 2000 Properties of laser cut LTCC heaters Microelectron Reliab 40 1005 1010
17. K Jaroslaw A Dziedzic LJ Golonka T Zawada 2002 Laser treatment of LTCC for 3D structures and elements fabrication Microelectron Int 19 3 14 18
18. C Zhang D Liu M Nieto-Santisteban A Szalay DJ DeWitt G Heber 2003 Laser direct write and its application in low temperature co-fired ceramic technology Microelectronic Eng 70 41 49
19. K Kordas AE Pap J Saavalainen H Jantunen P Moilanen E Hapaniemi 2005 Laser induced surface activation of LTCC materials for chemical metallization IEEE Trans Adv Packag 28 2 259 263
20. Cheng Jia Microfabrication of Microfluidic chip, Master Thesis, Southeast University, 2005, 6