Laser direct-write and its application in low temperature Co-fired ceramic (LTCC) technology

Microelectronic Engineering

Volumn 70, Issue 1, 2003, Pages 41-49

  Zhang, Chengping ^a   Liu, David ^a   Mathews, Scott A ^a   Graves, John ^a   Schaefer, Timothy M ^b   Gilbert, Barry K ^b   Modi, Rohit ^c   Wu, Huey Daw ^c   Chrisey, Douglas B ^c  

^a Potomac Photonics Inc   (United States)

^b MAYO CLINIC   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Band pass filter; Laser direct write; Low temperature Co fired ceramic (LTCC); Multilayer

Indexed keywords

BANDPASS FILTERS; CERAMIC CAPACITORS; CERAMIC MATERIALS; COBALT; ELECTRIC INDUCTORS; RESISTORS; ULTRASHORT PULSES; ULTRAVIOLET RADIATION;

ULTRAVIOLET LASERS;

MICROELECTRONIC PROCESSING;

EID: 0141754205     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00389-7     Document Type: Article

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