248 nm excimer laser drilling PI film for nozzle plate application

International Journal of Advanced Manufacturing Technology

Volumn 34, Issue 9-10, 2007, Pages 889-897

  Pan, C T ^a   Yang, H ^b   Wei, M K ^c  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^c NATIONAL DONG HWA UNIVERSITY   (Taiwan)

Author keywords

248 nm excimer laser; Microholes; Nozzle plate; PI

Indexed keywords

DRILLING; MACHINING; PHOTOMASKS; POLYIMIDES; THIN FILMS;

MICROHOLES; NOZZLE PLATE; PHOTOMASK PROJECTION; POLYIMIDE FILM;

EXCIMER LASERS;

MACHINING; POLYIMIDES;

EID: 34748841444     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-006-0653-9     Document Type: Article

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