Growth of ITO thin films by magnetron sputtering: OES study, opticaland electrical properties

Vacuum

Volumn 83, Issue SUPPL.1, 2009, Pages

  Iljinas, Aleksandras ^a,b   Mockevičius, Irmantas ^a,b   Andrulevičius, Mindaugas ^b   Meškinis, Šarunas ^b   Tamulevičius, Sigitas ^a,b  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Indium tin oxide; ITO; Magnetron sputtering; OES; UV vis; XPS

Indexed keywords

INDIUM TIN OXIDE; ITO; OES; UV-VIS; XPS;

ATOMIC SPECTROSCOPY; ELECTRIC PROPERTIES; ELECTRODEPOSITION; EMISSION SPECTROSCOPY; INDIUM; MAGNETRON SPUTTERING; MAGNETRONS; MOLECULAR SPECTROSCOPY; OPTICAL CORRELATION; OPTICAL EMISSION SPECTROSCOPY; OXIDE FILMS; PHOTOLITHOGRAPHY; SPECTRUM ANALYSIS; THIN FILMS; TIN; TITANIUM COMPOUNDS; TRANSPARENCY; X RAY PHOTOELECTRON SPECTROSCOPY;

OPTICAL FILMS;

EID: 67349114812     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.01.040     Document Type: Article

References (17)

1. Beena D., Lethy K.J., Vinodkumar R., and Mahadevan Pillai V.P. Solar Energy Materials & Solar Cells 91 (2007) 1438-1443
2. Mudryi A.V., Ivaniukovich A.V., and Ulyashin A.G. Thin Solid Films 515 (2007) 6489-6492
3. Guillén C., and Herrero J. Polycrystalline. Thin Solid Films 510 (2006) 260-264
4. Guillén C., and Herrero J. Vacuum 80 (2006) 615-620
5. Lee H.-C., and Park O. Ok. Vacuum 80 (2006) 880-887
6. Schroder Dieter K. Semiconductor material and device characterization. 2nd ed. (1998), John Wiley & Sons, New York
7. Cali C., Macaluso R., and Mosca M. Optics Communications 197 (2001) 341-354
8. Koufaki M., Sifakis M., Iliopoulos E., Pelekanos N., Modreanu M., Cimalla V., et al. Applied Surface Science 253 (2006) 405-408
9. Teixeira V., Cui H.N., Meng L.J., Fortunato E., and Martins R. Thin Solid Films 420-421 (2002) 70-75
10. Wagner ChD, Naumkin AV, Kraut-Vass A, Allison Juanita W, Powell CJ, Rumble Jr JR. NIST standard reference database 20, version 3.4.
11. Gheidari M., Behafarid F., Kavei G., and Kazemzad M. Materials Science and Engineering B 136 (2007) 37-40
12. Khodorov A., Piechowiak M., and Gomes M.J.M. Thin Solid Films 515 (2007) 7829-7833
13. Raoufi D., Kiasatpour A., Fallah H.R., and Rozatian A.S.H. Applied Surface Science 253 (2007) 9085-9090
14. Yeom H.-Y., Popovich N., Chason E., and Paine D.C. Thin Solid Films 411 (2002) 17-22
15. Boycheva S., Krasilnikova Sytchkova A., and Piegari A. Thin Solid Films 515 (2007) 8474-8478
16. Kurdesau F., Khripunov G., da Cunha A.F., Kaelin M., and Tiwari A.N. Journal of Non-Crystalline Solids 352 (2006) 1466-1470
17. Wu W., and Chiou B. Thin Solid Films 293 (1997) 244