Particle model analyses of N2O dilution with He on electrical characteristics of radio-frequency discharges

Journal of Applied Physics

Volumn 105, Issue 9, 2009, Pages

  Younis, G ^a   Yousfi, M ^a   Despax, B ^a  

^a Laboratoire Plasma et Conversion d'Energie   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BUFFER GAS; COLLISION PROCESS; COMPLEX BEHAVIOR; DIFFERENT PROCESS; DISSIPATED POWER; ELECTRICAL CHARACTERISTIC; ELECTRON DENSITIES; ELECTRON ENERGIES; INELASTIC PROCESS; LOW PRESSURES; NITROUS OXIDE; PARTICLE DENSITIES; PARTICLE ENERGY; PARTICLE MODEL; PLASMA REGION; POSITIVE COLUMN; POWER DENSITIES; RADIO FREQUENCY DISCHARGES;

ELECTRIC DISCHARGES; ELECTRIC FIELDS; ELECTRONS; NITROGEN OXIDES;

HELIUM;

EID: 67249159226     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3125442     Document Type: Article

References (22)

1. M. A. Liberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994); M. J. Kushner, J. Appl. Phys. 0021-8979 74, 6538 (1993) 10.1063/1.355115; V. A. Lisovsky, IEEE International Conference on Plasma Science, New York, 1995 (unpublished), p. 145.
2. A. C. Adams, F. B. Alexander, C. D. Capio, and T. E. Smith, J. Electrochem. Soc. 0013-4651 128, 1545 (1981) 10.1149/1.2127680; D. J. Eagle and W. I. Milne, Thin Solid Films 0040-6090 147, 259 (1987) 10.1016/0040-6090(87) 90021-6; H. Gokan, A. Morimoto, and M. Murahata, Thin Solid Films 0040-6090 149, 85 (1987). 10.1016/0040-6090(87)90251-3
3. M. L. Green, E. P. Gusev, R. Degraeve, and M. L. Garfunkel, J. Appl. Phys. 0021-8979 90, 2057 (2001) 10.1063/1.1385803; G. Dennler, A. Houdayer, Y. Segui, and M. R. Wertheimer, J. Vac. Sci. Technol. A 0734-2101 19, 2320 (2001) 10.1116/1.1385911; C. E. Viana, N. I. Morimoto, and O. Bonnaud, Microelectron. Reliab. 0026-2714 40, 613 (2000). 10.1016/S0026-2714(99)00288-7
4. M. Creatore, F. Palumbo, R. d'Agostino, and P. Fayet, Surf. Coat. Technol. 0257-8972 142-144, 163 (2001) 10.1016/S0257-8972(01)01095-7; U. Moosheimer and Ch. Bichler, Surf. Coat. Technol. 0257-8972 116-119, 812 (1999). 10.1016/S0257-8972(99)00137-1
5. P. Ambŕe, K. Wandel, E. H. Böttcher, and D. Bimberg, J. Appl. Phys. 0021-8979 77, 945 (1995) 10.1063/1.359025; C. Martinet, V. Paillard, A. Gagnaire, and J. Joseph, J. Non-Cryst. Solids 0022-3093 216, 77 (1997). 10.1016/S0022-3093(97)00175-0
6. J. Batey and E. Tierny, J. Appl. Phys. 0021-8979 60, 3136 (1986). 10.1063/1.337726
7. L. Date, K. Radouane, M. Yousfi, B. Despax, H. Caquineau, and A. Hennad, J. Phys. D 0022-3727 32, 1478 (1999). 10.1088/0022-3727/32/13/307
8. K. Radouane, L. Date, M. Yousfi, B. Despax, and H. Caquineau, J. Phys. D 0022-3727 33, 1332 (2000). 10.1088/0022-3727/33/11/312
9. G. Younis, B. Despax, M. Yousfi, and H. Caquineau, J. Phys. D 0022-3727 40, 2045 (2007). 10.1088/0022-3727/40/7/029
10. B. Despax, M. Yousfi, G. Younis, and H. Caquineau, J. Phys. D 0022-3727 38, 4290 (2005). 10.1088/0022-3727/38/24/004
11. A. P. Paranjpe, J. P. Mc Vittie, and S. A. Self, Phys. Rev. A 1050-2947 41, 6949 (1990) 10.1103/PhysRevA.41.6949; E. Cherrington, Gaseous Electronics and Gas Lasers (Pergamon, New York, 1979); M Roberto, H. B. Smith, and J. Verboncoeur, IEEE Trans. Plasma Sci. 0093-3813 31, 1292 (2003). 10.1109/TPS.2003.820682
12. G. Younis, Ph.D. thesis, Paul Sabatier University, 2005.
13. M. Yousfi and M. D. Benabdessadok, J. Appl. Phys. 0021-8979 80, 6619 (1996) 10.1063/1.363785; D. Nelson, M. Benhenni, O. Eichwald, and M. Yousfi, J. Phys. D 0022-3727 34, 3247 (2001) 10.1088/0022-3727/34/22/308; D. Nelson, M. Benhenni, O. Eichwald, and M. Yousfi, J. Appl. Phys. 0021-8979 94, 96 (2003). 10.1063/1.1582232
14. R. W. Crompton, M. T. Elford, and A. G. Robertson, Aust. J. Phys. 0004-9506 23, 667 (1970).
15. G. D. Alkhazov, Sov. Phys. Tech. Phys. 0038-5662 15, 66 (1970).
16. D. Rapp and P. Englander-Golden, J. Chem. Phys. 0021-9606 43, 2803 (1965).
17. R. H. Neynaber, S. M. Trujillo, L. L. Marino, and E. W. Rothe, in Proceedings of the Third International Conference on the Physics of Electronics and Atomic Collisions, edited by, M. Mc-Dowell, (Wiley, New York, 1964), p. 1089.
18. H. Deutsch, K. Becker, S. Matt, and T. D. Märk, J. Phys. B 0953-4075 32, 4249 (1999) 10.1088/0953-4075/32/17/309; A. J. Dixon, M. F. A. Harrison, and A. C. H. Smith, J. Phys. B 0022-3700 9, 2617 (1976) 10.1088/0022-3700/9/15/ 013; D. R. Long and R. Geballe, Phys. Rev. A 1050-2947 1 260 (1970) 10.1103/PhysRevA.1.260; D. Ton-That and M. R. Flannery, Phys. Rev. A 15, 517 (1977). 10.1103/PhysRevA.15.517
19. R. H. Neynaber, G. D. Magnuson, and S. Y. Tang, Chem. Phys. 0301-0104 68, 5112 (1978).
20. E. W. McDaniel, V. Carmak, A. Dalagarno, E. E. Ferguson, and L. Friedman, Ion-Molecule Reactions (Wiley-Interscience, Chichester, 1970); S. Sakabe and Y. Isawa, At. Data Nucl. Fusion 49, 257 (1991) 10.1016/0092-640X(91)90027-2 0301-0104; A. Himoudi, Ph.D. thesis, Paul Sabatier University, 1993.
21. M. Yousfi, A. Hennad, and M. Benhenni, J. Phys. D 0022-3727 40, 1751 (2007). 10.1088/0022-3727/40/6/023
22. M. J. Wynn, J. D. Martin, and T. L. Bailey, J. Chem. Phys. 0021-9606 52, 191 (1970). 10.1063/1.1672664