Swarm data of O-, NO-, He+, N 2O+, SiH3+ and SiH2 + ions in N2O, He and N2O-He mixtures for PECVD applications

Journal of Physics D: Applied Physics

Volumn 40, Issue 6, 2007, Pages 1751-1762

  Yousfi, M ^a   Hennad, A ^b   Benhenni, M ^a  

^a d'Hydraulique et des Telecommunications   (France)

^b UNIVERSITÉ DES SCIENCES ET DE LA TECHNOLOGIE D ORAN MOHAMED BOUDIAF   (Algeria)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTRIC DISCHARGES; GAS MIXTURES; ION BOMBARDMENT; MONTE CARLO METHODS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

INELASTIC CROSS SECTIONS; ION SWARM DATA; LINEAR APPROXIMATIONS; SWARM PARAMETERS;

PLASMA COLLISION PROCESSES;

EID: 33947630281     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/6/023     Document Type: Article

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