Power dissipation analysis in N2O RF discharges using Monte Carlo modelling

Journal of Physics D: Applied Physics

Volumn 40, Issue 7, 2007, Pages 2045-2054

  Younis, G ^a   Despax, B ^a   Yousfi, M ^a   Caquineau, H ^a  

^a d'Hydraulique et des Telecommunications   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRICAL ENGINEERING; ELECTRONEGATIVITY; ENERGY DISSIPATION; MICROSCOPIC EXAMINATION; NITROGEN OXIDES;

ELECTRON GAS PROCESSES; ELECTRONEGATIVE DISCHARGES; LOW PRESSURE DISCHARGES; POWER DENSITIES;

ELECTRIC DISCHARGES;

EID: 33947424031     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/7/029     Document Type: Article

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