Power dissipation analysis in N2O/He RF discharges using particle modelling

Journal of Physics D: Applied Physics

Volumn 38, Issue 24, 2005, Pages 4290-4295

  Despax, B ^a   Yousfi, M ^a   Younis, G ^a   Caquineau, H ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; ENERGY DISSIPATION; HELIUM;

ELECTRIC MODEL; POWER VARIATION; RADIOFREQUENCY (RF) DISCHARGES;

NITROGEN COMPOUNDS;

EID: 29044441117     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/38/24/004     Document Type: Article

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