Analysis of the N2O dissociation in a RF discharge reactor

Journal of Physics D: Applied Physics

Volumn 32, Issue 13, 1999, Pages 1478-1488

  Date, L ^a   Radouane, K ^a   Despax, B ^a   Yousfi, M ^a   Caquineau, H ^a   Hennad, A ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; DISSOCIATION; ELECTRIC DISCHARGES; ELECTRIC PROPERTIES; ELECTRONS; HYDRODYNAMICS; MATHEMATICAL MODELS; OXYGEN; SILICON COMPOUNDS; SPECTROSCOPY;

ELECTRICAL DISCHARGE MODEL; RADIO FREQUENCY DISCHARGE REACTOR;

NITROGEN OXIDES;

EID: 0032652361     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/13/307     Document Type: Article

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