A Nanoindenter based method for studying MEMS contact switch microcontacts

Electrical Contacts, Proceedings of the Annual Holm Conference on Electrical Contacts

Volumn , Issue , 2008, Pages 137-144

  Gilbert, Kevin W ^a   Mall, Shankar ^a   Leedy, Kevin D ^b   Crawford, Bryan ^c  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

^c AGILENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION FORCES; CONTACT BEHAVIOR; CONTACT FORCES; CONTACT STIFFNESS; CONTACT SWITCHES; ELECTRICAL CONTACTS; ELECTRICAL PROCESS; EXPERIMENTAL SETUP; MATERIAL PROPERTY; METAL CONTACTS; MICRO CONTACT; NANOINDENTER; ON-RESISTANCE; SILICON CANTILEVER; TEST DATA; TEST RESULTS;

ELECTRIC CONTACTS; ELECTRIC SWITCHES; GOLD; MEMS; NANOCANTILEVERS; NANOINDENTATION; STRAIN HARDENING;

MICROELECTROMECHANICAL DEVICES;

EID: 67249159146     PISSN: 03614395     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/HOLM.2008.ECP.35     Document Type: Conference Paper

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