Development of adhesive contact of mems-switches upon actuation cycling

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 439-442

  Gregore, G ^a   Mihailovich, R E ^b   DeNatale, J F ^b   Clarke, D R ^a  

^a University of California   (United States)

^b ROCKWELL SCIENTIFIC COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE CONTACTS; CONTACT FORCES; MEMS SWITCHES; MICROSTRUCTURAL CHANGES;

ACTUATORS; ADHESIVES; ELECTRIC CONTACTS; ELECTRIC VARIABLES MEASUREMENT; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE;

SWITCHES;

EID: 26844518120     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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