AFM-based testing and measurements of contact and stiction in a micromechanical switch

Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004

Volumn , Issue PART A, 2004, Pages 65-68

  Chen, Lei ^a   McGruer, Nicol E ^a   Adams, George G ^a  

^a NORTHEASTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; ELECTRIC CONTACTS; ELECTRIC RESISTANCE; ELECTROMAGNETIC FIELDS; MECHANICAL ENGINEERING; MICROMACHINING; SCANNING; STICTION; SWITCHES;

CONTACT FORCE; CONTACT RESISTANCE; MICROMECHANICAL SWITCH; SCANNING PROBE MICROSCOPES (SPM);

MICROELECTROMECHANICAL DEVICES;

EID: 21244455259     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/trib2004-64348     Document Type: Conference Paper

References (10)

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