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Volumn , Issue , 2008, Pages 145-150

Electrical contact reliability in a magnetic MEMS switch

Author keywords

MEMS microswitch, Reliability, Electrical contact

Indexed keywords

ELECTRIC SWITCHES; RELIABILITY;

EID: 67249102322     PISSN: 03614395     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/HOLM.2008.ECP.36     Document Type: Conference Paper
Times cited : (19)

References (23)
  • 1
    • 0018496252 scopus 로고
    • Micromechanical membrane switches on silicon
    • Petersen, K., Micromechanical membrane switches on silicon, IBM Journal of Research and Development, 1979, 23, no. 4, 376-385.
    • (1979) IBM Journal of Research and Development , vol.23 , Issue.4 , pp. 376-385
    • Petersen, K.1
  • 4
    • 0033319678 scopus 로고    scopus 로고
    • Contact physics of gold microcontacts for MEMS switches, Components and packaging technologies
    • Hyman, D. & Mehregany, M., Contact physics of gold microcontacts for MEMS switches, Components and Packaging Technologies, IEEE Transactions on, 1999, 22, 357-364.
    • (1999) IEEE Transactions on , vol.22 , pp. 357-364
    • Hyman, D.1    Mehregany, M.2
  • 8
    • 14944365228 scopus 로고    scopus 로고
    • Fundamental studies of au contacts in MEMS RF switches
    • Patton, S. & Zabinski, J. ; Fundamental studies of Au contacts in MEMS RF switches, Tribology Letters, 2005, 18, 215-230.
    • (2005) Tribology Letters , vol.18 , pp. 215-230
    • Patton, S.1    Zabinski, J.2
  • 9
    • 34147138241 scopus 로고    scopus 로고
    • Electrical contact resistance degradation of a hot-switched simulated metal MEMS contact
    • Dickrell, D. & Dugger, M., Electrical Contact Resistance Degradation of a hot-switched simulated metal MEMS contact, IEEE Transactions on Components and Packaging Technologies, 2007, 30, 75-80.
    • (2007) IEEE Transactions on Components and Packaging Technologies , vol.30 , pp. 75-80
    • Dickrell, D.1    Dugger, M.2
  • 11
    • 67249154969 scopus 로고    scopus 로고
    • Cutler-Hammer
    • Slade, P., Electrical contacts : principles and applications, Cutler- Hammer, 1999.
    • (1999)
    • Slade, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.