Study of devices leakage of 45nm node with different SRAM layouts using an advanced e-beam inspection systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7272, Issue , 2009, Pages

  Xiao, Hong ^a   Ma, Long ^a   Zhao, Yan ^a   Jau, Jack ^a  

^a Hermes Microvision Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

45NM NODE; CONTACT HOLES; E-BEAM INSPECTION; NICKEL SUICIDE; OVER-ETCHING; POSITIVE MODE; STATIC RANDOM ACCESS MEMORY; VOLTAGE CONTRAST;

INSPECTION; PROCESS CONTROL; STATIC RANDOM ACCESS STORAGE;

LEAKAGE (FLUID);

EID: 66649123135     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.813885     Document Type: Conference Paper

References (5)

1. Jean-Luc Baltzinger, Stephanie DesmerciBres, SBbastien Lasserre, Patrick Champonnois, Michèle Mercier, "E-beam inspection of dislocations: product monitoring and process change validation" Proc. of IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp. 361, (2004)
2. Kirin Wang, Hermes Liu, J. H. Yeh, Mingsheng Tsai, Wei-Yih Wu, Hong-Chi Wu, Hong Xiao and Jack Jau, "Post-WCMP Leakage Detection and Monitoring on 65-nm Devices Using an Advanced e-beam Inspection System", Proc. of IEEE International Symposium of Semiconductor Manufacturing, pp. 472, (2005)
3. M. Tsuchiaki, K. Ohuchi, and A. Nishiyama, "Drastic suppression of thermally induced leakage of NiSi silicided shallow junctions by pre-SALICIDE Fluorine implantation," IEDM Tech. Dig., pp. 1059, (2004)
4. Shuen-chen Lei, Hermes Liu, Mingsheng Tsai, Hung-Chi Wu, Hong Xiao and Jack Jau, "Contact leakage and open monitoring with an advanced e-beam inspection system", Proc. of SPIE, Vol. 6518, pp. 651841, (2007)
5. Li-Lung Lai, Keren Xu, Daniel Deng, Jay Ning, Hong Xiao, Yan Zhao, Eric Ma, and Jack Jau, "Mechanism and Application of Negative Charging Mode of Electron Beam Inspection for PMOS Leakage Detection", Proc. of IEEE International Interconnect Technology Conf., pp. 111, (2007)