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Volumn 7272, Issue , 2009, Pages
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The measurement uncertainty challenge for the future technological nodes production and development
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Author keywords
3D AFM; Accuracy; CD SEM; OPC; Reference; Uncertainty; Yield
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Indexed keywords
3D-AFM;
ACCURACY;
CD-SEM;
OPC;
REFERENCE;
UNCERTAINTY;
YIELD;
ATOMIC FORCE MICROSCOPY;
DATA STORAGE EQUIPMENT;
MEASUREMENTS;
PROCESS CONTROL;
SEMICONDUCTOR DEVICE MANUFACTURE;
SHRINKAGE;
THREE DIMENSIONAL;
UNCERTAINTY ANALYSIS;
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EID: 66649088013
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.812446 Document Type: Conference Paper |
Times cited : (11)
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References (9)
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