Microscopic TV shearography for characterization of microsystems

Optics Letters

Volumn 34, Issue 10, 2009, Pages 1612-1614

  Kumar, U Paul ^a   Kothiyal, M P ^a   Mohan, N Krishna ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; MEMS;

EXTERNAL PRESSURES; MICHELSON; OPTICAL ARRANGEMENT; OUT-OF-PLANE DEFORMATIONS; SHEAROGRAPHY; WORKING DISTANCES;

MICROSYSTEMS;

EID: 66349121379     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.34.001612     Document Type: Article

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